When I came to the office of the Shanghai Microelectronics Division, there were already a dozen people waiting there. They were from the Institute of Optoelectronics, Chinese Academy of Sciences, and Changguang Institute. Today, this academician team is composed of the Chinese Academy of Sciences. The leader personally led the team.

"Mr. Meng, the evaluation work on the development of next-generation lithography machines has ended."

"Thanks, everyone, don't know what the conclusion is?"

"Meng is right. The R&D value and difficulty of next-generation lithography machines are no less than that of aircraft carriers."

Meng Qian nodded involuntarily, "The more the entire lithography machine project progresses, the more problems there will be, and the difficulty of the development of the next generation lithography machine is also refreshing our understanding.

As far as we know, a group of top global companies, including Zeiss and Cymer, have also encountered difficulties. Zeiss has given up on its R&D direction for three consecutive years and is preparing to make adjustments. The development of next-generation lithography machines is destined to be a fierce battle.

What has not changed is that the core technology of the next-generation lithography machine is still the light source, lens and precision instruments, but this time we need the world's top related technologies. "

Dean Lu put a document in front of Meng Qian, showing a kind smile, "Meng, take a look, this is our draft."

This draft is modified on the basis of the draft submitted by Dafeng Group. The content of the draft previously submitted by Dafeng Group is based on the lithography machine as the core project, accelerating the formal approval and establishment of the Hangzhou National Laboratory of Cyber ​​Physics. As the axis, it promotes a large-scale technological development.

As I said before, the significance of the national laboratory is extremely important. Although Meng Qian showed the leaders of the company’s future laboratory, although the goal is directed at the fourth industrial revolution, the current vision is greater than the reality. The national laboratory needs some real A large project that exists objectively and can be established.

So Meng Qian found such a project, that is, the next generation of lithography machine.

This project of lithography machine is very in line with the above appetite, because it has three characteristics, the difficulty of the project has reached the world’s top level, the development of lithography machine can stimulate the development of many important disciplines such as material science, precision machinery, and the lithography machine itself More important chip development has key value.

And because this national laboratory relies on the private enterprise Dafeng Group, the aircraft carrier drives the scientific and technological development of state-owned enterprises to a greater extent, and the Hangzhou National Laboratory of Information Physics can just promote the scientific and technological development of private enterprises to a greater extent. At the same time, it is perfect.

From the draft submitted by Dafeng Group, it can be seen that with regard to the manufacturing of lithography machines, Dafeng Group has convened more than 80 experts in the fields of precision instruments, light sources, lenses, etc. For domestic enterprises, this project will directly affect the technological development of a group of domestic enterprises.

In addition, Dafeng Group itself is a private company, and the lithography machine itself is a commercial product of Dafeng Group. It can also attract external resources to a controllable degree. For example, it is also written in the draft and Dafeng Group is looking for overseas cooperation units. In a neon country alone, there are more than a dozen neon country-related top companies including Hitachi, Neon Country Yamazaki Mazak, Neon Country Jettekt, and Neon Country Medron.

Dafeng Group exchanged its own technology and market for corresponding cooperation, either pure manufacturing or technical support, and provided strong off-site assistance for the lithography machine project.

Once the lithography machine project has successfully promoted the relevant domestic technical level, it will be possible to further develop the technology related to the fourth industrial revolution, so the next generation lithography machine will be used as the core project of the Hangzhou National Laboratory of Information Physics. , With all the appropriate factors.

In the revised draft, the main purpose is to clarify the rights and obligations and the role played by national scientific research institutions. For example, the Chinese Academy of Sciences will strongly support this project, but is the team coming from Dafeng Group employees? How are their salaries and responsibilities calculated?

Finally, the project system is adopted. The Hangzhou National Laboratory of Information Physics produces the project, and then takes the project to the national scientific research institution to invite the team. Finally, the team is released according to the project. The determined team will be paid by the Chinese Academy of Sciences. The national laboratory is here. A salary will be paid, but the person still belongs to the Chinese Academy of Sciences.

Then there is confidentiality work. After all, it is a national laboratory. The requirements for confidentiality work are extremely high. In particular, Dafeng Group is still a private enterprise and has to cooperate with foreign companies. The requirements for confidentiality work are even higher, and to some extent it is also the same. This kind of restriction, but there is no way, Meng Qian can understand it.

As for the technical output of the national laboratory, as a commercial product, the commercial profit of the product belongs to the Dafeng Group, but the project technology is naturally shared by the Dafeng Group and the country.

After reading the draft carefully, Meng Qian didn't have much opinion, and basically agreed. After all, Meng Qian didn't have any treasonous intentions.

The plan is no problem here. Dean Lu started to introduce to Meng Qian the people he brought today, "These three are Hu Song, He Xiaodong, and Luo Xiangang, from the Optoelectronics Institute of the Chinese Academy of Sciences."

What Meng Qian does not know is that these are the core technical talents who were responsible for the super-resolution lithography equipment project in the past. The super-resolution lithography equipment was completed by the team of the Optoelectronics Institute of the Chinese Academy of Sciences for 7 years. Fully self-developed lithography equipment realized under the premise of material monopoly.

This equipment breaks through key technologies such as high uniformity illumination, super-resolution lithography machine lens, nano-resolution focusing and gap measurement, and ultra-precision multi-degree-of-freedom workbench. It is the world's highest resolution ultraviolet super-resolution lithography The equipment has a maximum linewidth resolution of 22 nm in a single exposure.

The super-resolution lithography equipment project successfully broke the foreign monopoly in the field of high-end lithography equipment and provided a new solution for nano-optical processing.

Later, I introduced several people from the Institute of Electrical Engineering, Chinese Academy of Sciences. What Meng Qian didn’t know was that they were the people who successfully developed a high-speed atomic force microscope. The high-speed atomic force microscope was independently developed by the Institute of Electrical Engineering. The range can reach 50~70 microns.

As for the Changguang Institute, there are old acquaintances here, and many of them are old friends who have come to help develop lithography machines before.

Meng Qian shook hands with several top scientists and expressed their respect one by one. They will all enter the lithography machine project to provide assistance for the development of the next generation of lithography machines.

"By the way, how does Meng always think about R&D funding? As far as we know, in the face of the financial crisis, ASM is still determined to keep 1 billion euros in R&D funding next year." Dean Lu suddenly asked.

Meng Qian said with great certainty, “Regardless of whether the national laboratory is approved or not, our preparation for R&D of lithography machines next year will be twice that of Asim.”

"Twice? 2 billion euros?" Everyone knows that Dafeng Group is rich, but it is still a little excited. After all, a key factor behind China's backwardness is that it was too poor before, so China's scientists are very sensitive to R&D funding.

In the 1980s and 1990s, I don’t know how many projects were dragged to death by money. If there were money, national science and technology would not be what it is today.

"If you feel that doubling is a little bit less, you can also double it super."

Everyone smiled with complicated expressions. Looking at everyone's expressions, Meng Qian was also a little distressed, but Meng Qian knew that the future would be better. Throughout history, after 2009, it was a node where China Science and Technology began to explode. A very important reason here is that the country is rich.

Although the money is a bit late, there are actually many projects like super-resolution lithography equipment after 2009. This is also China's confidence to attack the industrial power, and it is also the reason why many people do not believe in the power of the country.

Because the development is so fast, China is a bit too fast whether it is a strong economy or a strong technology, causing some people to be unable to react at all. Because of the limitations of daily life, their cognition may be a few years ago, but In the past few years, Huaxia has been turned upside down, so when they look at Huaxia from the perspective of a few years ago, they still feel that this is not good and that is not good, but in fact they have already made countless major breakthroughs.

This is still under the premise of various restrictions in the United States. It is like the reason why we need to engage in super-resolution lithography equipment instead of traditional lithography equipment. Because the technology is monopolized, we have to switch to a more difficult direction. But even so, we There can still be breakthroughs again and again.

In addition to money, talents and market demand are also two important internal reasons for the rapid development of domestic science and technology in 2009. In the early years, there were too few places in China’s market that needed high-tech products. Don’t even think about selling them. There is no reason to use China’s products in the US and Germany. There is no reason to use China’s products~www.NovelMTL.com~until 09 After 2000, the demand for high technology in the China market began to increase, and the demand from the domestic market came, which naturally promoted the development of production equipment and materials.

Not to mention the talents. It is no good to have money without talents. After 2009, the first batch of Ph.Ds in the education reform started in 2000 almost came out, and the number of people returning from studying abroad began to increase, and talents came.

And this is exactly the reason for Meng Qian’s self-confidence. His self-confidence in front of Kakuya Daolang is really not a pretense. China has been able to find a breakthrough in the previous environment, not to mention that Dafeng Group has helped China establish many equal advantages in the past eight years. Although there are not many core technologies leading the world, at least many technologies have been pulled to the level where they can sit at a table and negotiate with the world.

Against this background of science and technology, Meng Qian firmly believes that China's technological explosion will definitely come even more violently.

After a whole day of communication, the two sides finally finalized all the details and went back to conduct a final review at the national level.

On October 31, 2008, the State formally approved the Hangzhou National Laboratory for Information Physics, the first national laboratory in China that relies on a private company, and was launched.

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